Authors: Konsta S. Ruotsalainen, Dmitry Morits
Published: Proceedings Volume 11697, MOEMS and Miniaturized Systems XX;
Partner: VTT
Year of publishing: 2021
Title: Beam-steering MOEMS system based on a resonant piezoMEMS mirror and a phase-locked loop controller
Place of publication: SPIE OPTO, 2021, Online Only