Beam-steering MOEMS system based on a resonant piezoMEMS mirror and a phase-locked loop controller | Konsta S. Ruotsalainen, Dmitry Morits | Proceedings Volume 11697, MOEMS and Miniaturized Systems XX | 2021 | Visit |
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Title | Authors | Place of Publication | Year | Link |
Beam-steering MOEMS system based on a resonant piezoMEMS mirror and a phase-locked loop controller | Konsta S. Ruotsalainen, Dmitry Morits | Proceedings Volume 11697, MOEMS and Miniaturized Systems XX | 2021 | Visit |
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